Semiconductor industry
Foto by Bermix Studio on Unsplash
The requirements for metrology in semiconductor production are diverse: highest purity grades, media resistance, tightness, precision, as well as adherence to SEMATECH and SEMI standards are crucial for the development and manufacturing of our measuring instruments for this sector.
Our product range offers individually tailored measuring solutions for monitoring pressure in systems for the supply of gases, chemicals, and solvents. Thanks to our innovative design, which is characterized by minimal dead spaces and efficient flushing properties of the measuring chambers, we enable a minimization of the times for commissioning and maintenance.
For applications in explosive hazard areas, there are also devices available that comply with current legal regulations and guidelines and are equipped with ATEX or FM approvals.
Application areas include:
- Gas supply systems such as gas sticks, gas panels, and bulk gas supplies.
- Supply with ultra-pure water.
- Supply with liquid chemicals.
- Level measurements for liquefied gases and solvents.
These specifications ensure exceptional performance and reliability of our measuring instruments in the highly specialized and demanding environments of the semiconductor industry by accurately and safely monitoring critical parameters.
- VCR® compatible face seal fittings
- Helium leak tested
- Electropolished case
- Process connection surface finish Ra ≤ 0.25 μm
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- High-accuracy pressure measurement 0.15 % RSS
- Excellent long-term stability
- Signal noise cancellation and shielding
- Vacuum-referenced pressure measurement
- Active temperature compensation
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- High overload protection up to 400 %
- 0.1 % FS Accuracy
- Meets the highest EMC requirements
- Measuring ranges 0 ... 27.22 kg to 0 ... 136.08 kg [0 ... 60 lbs to 0 ... 300 lbs]
- High ingress protection, IP65, for outdoor use and processes with high condensation
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- Ergonomic handling through the smooth-running, internally operating, precision spindle
- Integrated oil reservoir
- Removable star handle
- Freely rotating test connections (i.e. measuring instruments can be aligned)
- Integrated priming pump for large test volumes
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- Accuracy: 0.020 % FS
- Measuring range: 25 mbar ... 1,001 bar [10 inH2O ... 15,015 psi]
- Temperature compensation: 0 ... 50 °C [32 ... 122 °F]
- RS-232 or RS-485 communication
- Rugged and compact design
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- Pressure ranges: -1 ... 210 bar (-15 ... 3,045 psi)
- Control speed 15 s
- Control stability < 0.003 % FS (typical 0.001 % FS)
- Accuracy down to 0.01 % IS (IntelliScale)
- Precision 0.004 % FS
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- Dead space free media chamber
- Excellent rinsing behaviour
- Helium leak tested, leak rate ≤ 10-9mbar · l/s
- Case and media chamber electropolished, surface roughness Ra ≤ 0.25 μm
- All ultra high purity gas fittings available
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Datasheet |
| User Manual |
- Ergonomic handling through the smooth-running, internally operating, precision spindle
- Integrated oil reservoir
- Removable star handle
- Freely rotating test connections (i.e. measuring instruments can be aligned)
- Precise setting of the test pressure through a fine adjustment valve (optional for model CPP1000-M)
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Datasheet
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User Manual
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- Ergonomic handling through the smooth-running, internally operating, precision spindle
- Integrated oil reservoir
- Removable star handle
- Freely rotating test connections (i.e. measuring instruments can be aligned)
- Integrated priming pump for large test volumes
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Datenblatt
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Bedienungsanleitung
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- Pressure ranges: -1 ... 210 bar (-15 ... 3,045 psi)
- Control speed 10 s
- Control stability < 0.005 % FS
- Accuracy to 0.02 % IS (IntelliScale)
- Precision 0.008 % FS
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Datasheet
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User Manual
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- Strain of 0 … 200 με to max. 0 … 1,000 με
- Can be retrofitted, easy installation with M6-screws
- Total error < 1 % Fnom
- Electrical connection as cable, with plug-in radio module, display or junction box.
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- Dual mV/V display
- 2x digital input and 4x digital output
- Integrated multiple signal outputs available
- Serial interface, RS-232 or RS-485
- Ingress protection IP65
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