DatasheetApplications
- Semiconductor, flat panel display and photovoltaic industry
- Ultrapure media and special gas systems (gas sticks, gas panels, bulk gas supply, tank farm installations)
Special Features
- Compact design
- ATEX and IECEx zone 2 approval, FM class I div. 2 groups A, B, C & D
- Ingress protection IP67 (NEMA 4) with “side access” zero potentiometer
- Excellent EMC stability
- Active temperature compensation
Description
Compact
The space-saving design of the model WUC-1x provides greater free space in plants and installations.
The WUC-15 and 16 series transducers are notable for their excellent self-draining characteristics. The special sensor connection design eliminates the influence on the sensor signal through loads on the process connections or weld seams.
Versatile
The high IP67 ingress protection also enables them to be used under harsh conditions on tank farm and speciality gas installations outdoors.
This series of instruments was also developed for use in Ex zone 2. The T6 temperature class classification ensures that even measurements of media with low self-ignition temperatures, such as PH3 (phosphine), do not present a problem.
Reliable
With cyclic pressure rinsing, high gas throttling values (Joule-Thompson effect) and external operation, high temperature fluctuations can occur. The active temperature compensation detects these changes and minimises their influence. Thus stable measurement is ensured.
Through the sealed “side access” zero point adjustment, the high IP67 ingress protection is permanently maintained. Simple handling and protection from unintentional adjustment is ensured.
For all wetted parts the materials 316L VIM VAR and special thin-film sensors from 2.4711 / UNS R30003 are used. Prior to final assembly all wetted parts are electropolished and cleaned using state-of-the-art processes.
Through an individual examination of each transducer it is ensured that the required values for leak tightness, overpressure stability, accuracy and particles are met in accordance with the applicable SEMI™ standards.