DatasheetDruck UNIK5000-UHP – High-Performance Ultra-High Purity Pressure Transducer
The Druck UNIK5000-UHP is a high-performance pressure transducer specifically engineered to meet the demanding requirements of ultra-high purity process environments. It is designed for semiconductor fabrication, solar photovoltaic manufacturing, LCD and LED production, ultra-pure gas distribution systems, and cleanroom applications.
Built on Druck’s proven UNIK5000 platform, the UNIK5000-UHP combines advanced piezoresistive sensing technology, exceptional long-term stability, and specialized construction for high-purity processes. Cleanroom manufacturing, dedicated cleaning procedures, and protective packaging help maintain the cleanliness required in sensitive industrial production environments.
High Measurement Accuracy and Long-Term Stability
The UNIK5000-UHP provides pressure ranges from 1 to 350 bar and is available in gauge, absolute, and sealed gauge configurations. Different accuracy grades allow the transducer to be tailored to specific measurement requirements.
- Improved accuracy: ±0.1% FS BSL
- Industrial accuracy: ±0.2% FS BSL
- Typical long-term stability: ±0.05% FS per year
- Overpressure protection up to 1,200 bar, depending on configuration
Advanced piezoresistive sensing technology ensures accurate pressure measurement and excellent long-term stability, even in demanding industrial applications.
Ultra-High Purity Engineering to SEMI Standards
The UNIK5000-UHP is designed for applications involving ultra-pure gases and contamination-sensitive manufacturing processes.
Electropolished process fittings provide a surface roughness of Ra ≤ 0.13 µm (Ra 5) according to SEMI F19. Wetted materials are specified as compliant with SEMI F20, with optional VIM/VAR material configurations available.
All wetted components undergo dedicated cleaning and degreasing procedures. Double vacuum packaging helps protect the transducer against contamination during transportation and storage.
Flexible HP and UHP Process Connections
The UNIK5000-UHP offers a selection of high-purity (HP) and ultra-high purity (UHP) process fitting options to meet different system requirements.
These flexible connection configurations support integration into gas cabinets, gas distribution networks, process gas lines, and customized OEM pressure measurement systems.
Wide Temperature Range
The UNIK5000-UHP is designed for operating temperatures from -40 to +125 °C (-40 to +257 °F), supporting pressure measurement across a broad range of thermal environments.
Wide-range temperature compensation helps minimize temperature-related measurement deviations and maintain consistent performance in demanding applications.
Flexible Electrical Output Options
The pressure transducer supports multiple electrical output configurations for integration into industrial control, monitoring, and automation systems.
Available output options include:
- 4–20 mA
- 0–5 V
- 0–10 V
- Custom-configurable output signals
With a power-up time of less than 30 milliseconds, the UNIK5000-UHP becomes operational quickly, supporting efficient process monitoring and control.
Optional Hazardous Area Approvals
For applications in potentially explosive atmospheres, the UNIK5000-UHP is available with international hazardous area approvals, including ATEX, IECEx, FM, and NEPSI for intrinsically safe applications.
Certification availability depends on the selected transducer configuration and specific approval requirements.
Technical Specifications
| Parameter | Specification |
|---|---|
| Manufacturer | Druck |
| Model | UNIK5000-UHP |
| Device type | Ultra-high purity pressure transducer |
| Sensing technology | Piezoresistive pressure sensing |
| Pressure ranges | 1 to 350 bar |
| Pressure types | Gauge, absolute, sealed gauge |
| Improved accuracy | ±0.1% FS BSL |
| Industrial accuracy | ±0.2% FS BSL |
| Long-term stability | Typically ±0.05% FS/year |
| Overpressure protection | Up to 1,200 bar, depending on configuration |
| Temperature range | -40 to +125 °C (-40 to +257 °F) |
| Output signals | 4–20 mA, 0–5 V, 0–10 V, custom options |
| Power-up time | Less than 30 ms |
| Process connections | Various HP/UHP fitting options |
| Surface treatment | Electropolished process fittings |
| Surface roughness | Ra ≤ 0.13 µm (Ra 5), according to SEMI F19 |
| Wetted materials | SEMI F20 compliant |
| Material options | VIM/VAR available |
| Cleaning | Wetted components cleaned and degreased |
| Packaging | Double vacuum packed |
| Manufacturing | Cleanroom manufacturing |
| Hazardous area approvals | Optional ATEX, IECEx, FM, and NEPSI |
| Typical applications | Semiconductor fabrication, solar PV manufacturing, LCD/LED production, ultra-pure gas distribution |
Typical Applications
Semiconductor Fabrication
Precise pressure monitoring of ultra-pure process gases in semiconductor manufacturing equipment, gas supply systems, and contamination-sensitive fabrication processes.
Solar Photovoltaic Manufacturing
Pressure measurement in high-purity gas supply systems used in solar cell and photovoltaic module production.
Ultra-Pure Gas Distribution
Integration into gas cabinets, gas distribution systems, high-purity gas lines, and other installations handling ultra-pure process gases.
LCD and LED Manufacturing
Reliable pressure measurement in LCD and LED production environments requiring high cleanliness standards and stable process conditions.
Cleanroom and OEM Applications
Integration into customized industrial equipment and high-purity fluid systems with demanding requirements for materials, surface quality, cleanliness, and measurement performance.
Summary
The Druck UNIK5000-UHP combines precision pressure sensing with specialized ultra-high purity construction. Featuring electropolished process connections, SEMI-compliant wetted materials, cleanroom manufacturing, excellent long-term stability, and flexible configuration options, it provides a reliable pressure measurement solution for semiconductor, solar energy, and advanced electronics manufacturing applications.
